Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

I. Brener; P. Chu; M. Tsai; C. Pu; M. Chou; J. Dadap; D. Lee; B. Tang; D. Peale; N. Bonadeo; R. Harel; C. Wu; J. Johnson; S. Park; S. Lee; D. Tong; R. Doran; K. Bergman; T. Chau; E. Goldstein; L. Lin; J. Walker; W. Zhong; R. Gibson

Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

I. Brener
, P. Chu
, M. Tsai
, C. Pu
, M. Chou
, J. Dadap
, D. Lee
, B. Tang
, D. Peale
, N. Bonadeo
, R. Harel
, C. Wu
, J. Johnson
, S. Park
, S. Lee
, D. Tong
, R. Doran
, K. Bergman
, T. Chau
, E. Goldstein

L. Lin, J. Walker, W. Zhong, R. Gibson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical crossconnect with switching times of less than 10ms, and optical power stability of better than 0.2 dB.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
Pages	1-2
Number of pages	2
State	Published - Jan 1 2003
Externally published	Yes

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title = "Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch",

abstract = "We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical crossconnect with switching times of less than 10ms, and optical power stability of better than 0.2 dB.",

author = "I. Brener and P. Chu and M. Tsai and C. Pu and M. Chou and J. Dadap and D. Lee and B. Tang and D. Peale and N. Bonadeo and R. Harel and C. Wu and J. Johnson and S. Park and S. Lee and D. Tong and R. Doran and K. Bergman and T. Chau and E. Goldstein and L. Lin and J. Walker and W. Zhong and R. Gibson",

year = "2003",

month = jan,

day = "1",

language = "English",

isbn = "1557527318",

pages = "1--2",

booktitle = "Optics InfoBase Conference Papers",

}

Brener, I, Chu, P, Tsai, M, Pu, C, Chou, M, Dadap, J, Lee, D, Tang, B, Peale, D, Bonadeo, N, Harel, R, Wu, C, Johnson, J, Park, S, Lee, S, Tong, D, Doran, R, Bergman, K, Chau, T, Goldstein, E, Lin, L, Walker, J, Zhong, W & Gibson, R 2003, Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch. in Optics InfoBase Conference Papers. pp. 1-2.

TY - GEN

T1 - Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

AU - Brener, I.

AU - Chu, P.

AU - Tsai, M.

AU - Pu, C.

AU - Chou, M.

AU - Dadap, J.

AU - Lee, D.

AU - Tang, B.

AU - Peale, D.

AU - Bonadeo, N.

AU - Harel, R.

AU - Wu, C.

AU - Johnson, J.

AU - Park, S.

AU - Lee, S.

AU - Tong, D.

AU - Doran, R.

AU - Bergman, K.

AU - Chau, T.

AU - Goldstein, E.

AU - Lin, L.

AU - Walker, J.

AU - Zhong, W.

AU - Gibson, R.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical crossconnect with switching times of less than 10ms, and optical power stability of better than 0.2 dB.

AB - We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical crossconnect with switching times of less than 10ms, and optical power stability of better than 0.2 dB.

UR - https://www.scopus.com/pages/publications/85136826510

M3 - Conference contribution

SN - 1557527318

SP - 1

EP - 2

BT - Optics InfoBase Conference Papers

ER -

Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

Abstract

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