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Normally closed thermally activated irreversible solid state erbium hydrides switches

  • Michael J. Abere
  • , Richard J. Gallegos
  • , Matthew W. Moorman
  • , Mark A. Rodriguez
  • , Paul G. Kotula
  • , Rick A. Kellogg
  • , David P. Adams

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A thermally driven, micrometer-scale switch technology has been created that utilizes the ErH3/Er2O3 materials system. The technology is comprised of novel thin film switches, interconnects, on-board micro-scale heaters for passive thermal environment sensing, and on-board micro-scale heaters for individualized switch actuation. Switches undergo a thermodynamically stable reduction/oxidation reaction leading to a multi-decade (>11 orders) change in resistance. The resistance contrast remains after cooling to room temperature, making them suitable as thermal fuses. An activation energy of 290 kJ/mol was calculated for the switch reaction, and a thermos-kinetic model was employed to determine switch times of 120 ms at 560 °C with the potential to scale to 1 ms at 680 °C.

Original languageEnglish
Article number100243
JournalMicro and Nano Engineering
Volume23
DOIs
StatePublished - Jun 2024
Externally publishedYes

Keywords

  • REDOX
  • Single use
  • Solid-state switch
  • Thermal sensor
  • Thermal switch

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