Physical Optics Modelling of Soft X-ray Projection Lithography (SXPL) Imaging Experiments

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Jan 1 1993
Externally published	Yes

Cite this

@inproceedings{8a1f671bfa024e3097adf04446ee122b,

title = "Physical Optics Modelling of Soft X-ray Projection Lithography (SXPL) Imaging Experiments",

author = "Chow, \{Weng W.\} and Sweatt, \{William C.\} and Lawrence, \{George N.\} and Jewell, \{Tanya E.\}",

year = "1993",

month = jan,

day = "1",

language = "English",

booktitle = "Optics InfoBase Conference Papers",

}