Picosecond, tunable ArF* excimer laser source

H. Egger; T. S. Luk; K. Boyer; D. F. Muller; H. Pummer; T. Srinivasan; C. K. Rhodes

doi:10.1063/1.93383

Picosecond, tunable ArF* excimer laser source

H. Egger
, T. S. Luk
, K. Boyer
, D. F. Muller
, H. Pummer
, T. Srinivasan
, C. K. Rhodes

Research output: Contribution to journal › Article › peer-review

68 Scopus citations

Abstract

A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2.

Original language	English
Pages (from-to)	1032-1034
Number of pages	3
Journal	Applied Physics Letters
Volume	41
Issue number	11
DOIs	https://doi.org/10.1063/1.93383
State	Published - Dec 1 1982
Externally published	Yes

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title = "Picosecond, tunable ArF* excimer laser source",

abstract = "A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2.",

author = "H. Egger and Luk, \{T. S.\} and K. Boyer and Muller, \{D. F.\} and H. Pummer and T. Srinivasan and Rhodes, \{C. K.\}",

year = "1982",

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doi = "10.1063/1.93383",

language = "English",

volume = "41",

pages = "1032--1034",

journal = "Applied Physics Letters",

issn = "0003-6951",

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T1 - Picosecond, tunable ArF* excimer laser source

AU - Egger, H.

AU - Luk, T. S.

AU - Boyer, K.

AU - Muller, D. F.

AU - Pummer, H.

AU - Srinivasan, T.

AU - Rhodes, C. K.

PY - 1982/12/1

Y1 - 1982/12/1

N2 - A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2.

AB - A 40-mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2.

UR - https://www.scopus.com/pages/publications/36749110750

U2 - 10.1063/1.93383

DO - 10.1063/1.93383

M3 - Article

SN - 0003-6951

VL - 41

SP - 1032

EP - 1034

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Picosecond, tunable ArF* excimer laser source

Abstract

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