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Piezo-optomechanical Control of Silicon Photonic Resonator with CMOS Compatibility

  • Gina M. Talcott
  • , Andrew J. Leenheer
  • , Andrew Starbuck
  • , Kate Mustek
  • , Andrew Pomerene
  • , Christina Dallo
  • , Douglas C. Trotter
  • , Scott Madaras
  • , Michael Gehl
  • , Anthony L. Lentine
  • , Matt Eichenfield
  • , Nils T. Otterstrom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate piezo-optomechanical phase control in a c-band silicon-photonic resonator using CMOS-compatible A1N microactuators. We achieve a frequency tuning response of 26.91 ± 0.77 MHz/V DC, operating at picowatt to nanowatt power levels.
Original languageEnglish
Title of host publication2023 Conference on Lasers and Electro-Optics, CLEO 2023
StatePublished - Jan 1 2023
Externally publishedYes

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