Abstract
We demonstrate piezo-optomechanical phase control in a c-band silicon-photonic resonator using CMOS-compatible A1N microactuators. We achieve a frequency tuning response of 26.91 ± 0.77 MHz/V DC, operating at picowatt to nanowatt power levels.
| Original language | English |
|---|---|
| Title of host publication | 2023 Conference on Lasers and Electro-Optics, CLEO 2023 |
| State | Published - Jan 1 2023 |
| Externally published | Yes |
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