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Piezo-Optomechanically Tunable Ultra-Low-Loss Silicon Nitride Waveguide Photonic Circuits

  • Mayank Mishra
  • , Gwangho Choi
  • , Gina M. Talcott
  • , Michael Gehl
  • , Andrew Leenheer
  • , Daniel Dominguez
  • , Nils T. Otterstrom
  • , Matt Eichenfield

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present optimized designs, CMOS fabrication, and characterization of reconfigurable PICs utilizing high-aspect-ratio, low-confinement silicon nitride waveguides and piezo-optomechanical modulators. Our platform achieves 3 - 5 dB/m propagation loss at visible wavelengths, while maintaining the responsivity VπL≈ 80 Vcm of the high-confinement architecture.

Original languageEnglish
Title of host publication2025 Conference on Lasers and Electro-Optics, CLEO 2025
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781957171500
StatePublished - 2025
Externally publishedYes
Event2025 Conference on Lasers and Electro-Optics, CLEO 2025 - Long Beach, United States
Duration: May 4 2025May 9 2025

Publication series

Name2025 Conference on Lasers and Electro-Optics, CLEO 2025

Conference

Conference2025 Conference on Lasers and Electro-Optics, CLEO 2025
Country/TerritoryUnited States
CityLong Beach
Period05/4/2505/9/25

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