Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances

Artur Hermans; Ian R. Christen; Christopher Panuski; Matthew Zimmermann; Andrew J. Leenheer; Mark Dong; Gerald Gilbert; Matt Eichenfield; Dirk Englund

Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances

Artur Hermans
, Ian R. Christen
, Christopher Panuski
, Matthew Zimmermann
, Andrew J. Leenheer
, Mark Dong
, Gerald Gilbert
, Matt Eichenfield
, Dirk Englund

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate a high-speed spatial light modulator technology based on a silicon nitride platform fabricated in a CMOS process. Using piezoelectrically modulated guided-mode resonances, we can reach bandwidths over 10 MHz for a single pixel.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Jan 1 2022
Externally published	Yes

Cite this

@inproceedings{d194b19c1bd840e5972e7cc7547c35b9,

title = "Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances",

abstract = "We demonstrate a high-speed spatial light modulator technology based on a silicon nitride platform fabricated in a CMOS process. Using piezoelectrically modulated guided-mode resonances, we can reach bandwidths over 10 MHz for a single pixel.",

author = "Artur Hermans and Christen, \{Ian R.\} and Christopher Panuski and Matthew Zimmermann and Leenheer, \{Andrew J.\} and Mark Dong and Gerald Gilbert and Matt Eichenfield and Dirk Englund",

year = "2022",

month = jan,

day = "1",

language = "English",

booktitle = "Optics InfoBase Conference Papers",

}

TY - GEN

T1 - Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances

AU - Hermans, Artur

AU - Christen, Ian R.

AU - Panuski, Christopher

AU - Zimmermann, Matthew

AU - Leenheer, Andrew J.

AU - Dong, Mark

AU - Gilbert, Gerald

AU - Eichenfield, Matt

AU - Englund, Dirk

PY - 2022/1/1

Y1 - 2022/1/1

N2 - We demonstrate a high-speed spatial light modulator technology based on a silicon nitride platform fabricated in a CMOS process. Using piezoelectrically modulated guided-mode resonances, we can reach bandwidths over 10 MHz for a single pixel.

AB - We demonstrate a high-speed spatial light modulator technology based on a silicon nitride platform fabricated in a CMOS process. Using piezoelectrically modulated guided-mode resonances, we can reach bandwidths over 10 MHz for a single pixel.

UR - https://www.scopus.com/pages/publications/85136800808

M3 - Conference contribution

BT - Optics InfoBase Conference Papers

ER -

Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances

Abstract

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