Plan View Specimen Preparation Via Vacuum Assisted ex situ Lift Out

Lisa Marie Lowery; Ping Lu; Paul G. Kotula; Joseph R. Michael; Lucille A. Giannuzzi

Plan View Specimen Preparation Via Vacuum Assisted ex situ Lift Out

Lisa Marie Lowery
, Ping Lu
, Paul G. Kotula
, Joseph R. Michael
, Lucille A. Giannuzzi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Vacuum assisted cx situ lilt out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.

Original language	English
Title of host publication	Conference Proceedings from the International Symposium for Testing and Failure Analysis
Pages	252-255
Number of pages	4
State	Published - Jan 1 2018
Externally published	Yes

Cite this

@inproceedings{ea67682f38f5468895bc2fcd001edaea,

title = "Plan View Specimen Preparation Via Vacuum Assisted ex situ Lift Out",

abstract = "Vacuum assisted cx situ lilt out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.",

author = "Lowery, \{Lisa Marie\} and Ping Lu and Kotula, \{Paul G.\} and Michael, \{Joseph R.\} and Giannuzzi, \{Lucille A.\}",

year = "2018",

month = jan,

day = "1",

language = "English",

isbn = "9781627080996",

pages = "252--255",

booktitle = "Conference Proceedings from the International Symposium for Testing and Failure Analysis",

}

TY - GEN

T1 - Plan View Specimen Preparation Via Vacuum Assisted ex situ Lift Out

AU - Lowery, Lisa Marie

AU - Lu, Ping

AU - Kotula, Paul G.

AU - Michael, Joseph R.

AU - Giannuzzi, Lucille A.

PY - 2018/1/1

Y1 - 2018/1/1

N2 - Vacuum assisted cx situ lilt out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.

AB - Vacuum assisted cx situ lilt out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.

UR - https://www.scopus.com/pages/publications/85122398200

M3 - Conference contribution

SN - 9781627080996

SP - 252

EP - 255

BT - Conference Proceedings from the International Symposium for Testing and Failure Analysis

ER -

Plan View Specimen Preparation Via Vacuum Assisted ex situ Lift Out

Abstract

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