Polymer film to prevent intermixing

W. J. Zubrzycki; G. A. Vawter; G. M. Peake; T. Hargett; C. Alford; B. Salters; S. D. Mukherjee

Polymer film to prevent intermixing

W. J. Zubrzycki
, G. A. Vawter
, G. M. Peake
, T. Hargett
, C. Alford
, B. Salters
, S. D. Mukherjee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present a new surface treatment that controls selective area quantum well intermixing. A CHF3/O2 plasma in an RIE system is used to form a polymer on localized areas that prevents intermixing.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Jan 1 2004
Externally published	Yes

Cite this

@inproceedings{ad89a4f83b1644b9800d9428205af326,

title = "Polymer film to prevent intermixing",

abstract = "We present a new surface treatment that controls selective area quantum well intermixing. A CHF3/O2 plasma in an RIE system is used to form a polymer on localized areas that prevents intermixing.",

author = "Zubrzycki, \{W. J.\} and Vawter, \{G. A.\} and Peake, \{G. M.\} and T. Hargett and C. Alford and B. Salters and Mukherjee, \{S. D.\}",

year = "2004",

month = jan,

day = "1",

language = "English",

isbn = "1557527741",

booktitle = "Optics InfoBase Conference Papers",

}

TY - GEN

T1 - Polymer film to prevent intermixing

AU - Zubrzycki, W. J.

AU - Vawter, G. A.

AU - Peake, G. M.

AU - Hargett, T.

AU - Alford, C.

AU - Salters, B.

AU - Mukherjee, S. D.

PY - 2004/1/1

Y1 - 2004/1/1

N2 - We present a new surface treatment that controls selective area quantum well intermixing. A CHF3/O2 plasma in an RIE system is used to form a polymer on localized areas that prevents intermixing.

AB - We present a new surface treatment that controls selective area quantum well intermixing. A CHF3/O2 plasma in an RIE system is used to form a polymer on localized areas that prevents intermixing.

UR - https://www.scopus.com/pages/publications/85135924614

M3 - Conference contribution

SN - 1557527741

BT - Optics InfoBase Conference Papers

ER -

Polymer film to prevent intermixing

Abstract

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