Abstract
A KrF excimer laser system which produces subpicosecond pulses with an energy of approx. 350 mJ (<5% ASE) is described. The pulses can be focused to an intensity approx. 1018 W·cm-2. The current limits to performance are discussed, along with estimates of the ultimate performance.
| Original language | English |
|---|---|
| Pages | 187-189 |
| Number of pages | 3 |
| State | Published - Dec 1 1988 |
| Externally published | Yes |
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