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RBS AND TEM ANALYSIS OF Ta SILICIDES ON GaAs.

  • K. L. Kavanagh
  • , S. H. Chen
  • , C. J. Palmstrom
  • , C. B. Carter
  • , S. D. Mukherjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish
Title of host publicationMaterials Research Society Symposia Proceedings
Pages143-148
Number of pages6
Volume25
StatePublished - Jan 1 1984

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