Abstract
Disappearance of NF3 and appearance of NF2 and N2F2 in an excimer laser is followed quantitatively with a mass spectrometer. A model for the kinetics is presented. © 1977 Springer-Verlag.
| Original language | English |
|---|---|
| Pages (from-to) | 1-3 |
| Number of pages | 3 |
| Journal | Applied Physics |
| Volume | 13 |
| Issue number | 1 |
| DOIs | |
| State | Published - May 1 1977 |
| Externally published | Yes |
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