Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

Tellurium (Te) dielectric resonator metamaterials for thermal infrared applications were fabricated using a multi-cycle deposition-etch process that circumvents pinch-off issues during deposition. Deposition and etching of Te were studied in detail. Metamaterial samples with varying resonator dimensions were fabricated using this technique. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances. Longer resonant wavelengths were observed as the resonator dimension was increased. Observation of spectral overlap between magnetic and electric resonances gives us the potential opportunity to realize a negative refractive index material. © 2013 AIP Publishing LLC.