Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

Sheng Liu; Jon F. Ihlefeld; Jason Dominguez; Edward F. Gonzales; John Eric Bower; Bruce D. Burckel; Michael B. Sinclair; Igal Brener

Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

Sheng Liu
, Jon F. Ihlefeld
, Jason Dominguez
, Edward F. Gonzales
, John Eric Bower
, Bruce D. Burckel
, Michael B. Sinclair
, Igal Brener

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances. OCIS codes: (160.3918) Metamaterials; (220.4000) Microstructure fabrication; (160.4670) Optical materials. © OSA 2013.

Original language	English
Title of host publication	CLEO: Science and Innovations, CLEO_SI 2013
State	Published - Nov 18 2013
Externally published	Yes

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@inproceedings{1bc7fb3f4f0e4c1198d7c51e3d2db3a4,

title = "Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process",

abstract = "Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances. OCIS codes: (160.3918) Metamaterials; (220.4000) Microstructure fabrication; (160.4670) Optical materials. {\textcopyright} OSA 2013.",

author = "Sheng Liu and Ihlefeld, \{Jon F.\} and Jason Dominguez and Gonzales, \{Edward F.\} and Bower, \{John Eric\} and Burckel, \{Bruce D.\} and Sinclair, \{Michael B.\} and Igal Brener",

year = "2013",

month = nov,

day = "18",

language = "English",

isbn = "9781557529725",

booktitle = "CLEO: Science and Innovations, CLEO\_SI 2013",

}

TY - GEN

T1 - Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

AU - Liu, Sheng

AU - Ihlefeld, Jon F.

AU - Dominguez, Jason

AU - Gonzales, Edward F.

AU - Bower, John Eric

AU - Burckel, Bruce D.

AU - Sinclair, Michael B.

AU - Brener, Igal

PY - 2013/11/18

Y1 - 2013/11/18

N2 - Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances. OCIS codes: (160.3918) Metamaterials; (220.4000) Microstructure fabrication; (160.4670) Optical materials. © OSA 2013.

AB - Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances. OCIS codes: (160.3918) Metamaterials; (220.4000) Microstructure fabrication; (160.4670) Optical materials. © OSA 2013.

UR - https://www.scopus.com/pages/publications/84887434591

M3 - Conference contribution

SN - 9781557529725

BT - CLEO: Science and Innovations, CLEO_SI 2013

ER -

Realization of tellurium-based all dielectric optical metamaterials using a multi-cycle deposition-etch process

Abstract

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