Resonantly driven piezoelectric MEMS for programmable photonic circuits

Mark Dong; Julia M. Boyle; Kevin J. Palm; Matthew Zimmermann; Alex Witte; Andrew J. Leenheer; Daniel Dominguez; Gerald Gilbert; Matt Eichenfield; Dirk Englund

Resonantly driven piezoelectric MEMS for programmable photonic circuits

Mark Dong
, Julia M. Boyle
, Kevin J. Palm
, Matthew Zimmermann
, Alex Witte
, Andrew J. Leenheer
, Daniel Dominguez
, Gerald Gilbert
, Matt Eichenfield
, Dirk Englund

Research output: Contribution to conference › Paper › peer-review

Abstract

We report the design and characterization of piezoelectric MEMS optical modulators in large-scale programmable integrated photonics. The mechanical resonances are exploited to achieve modulation enhancement for a high-speed, periodic optical switch.

Original language	English
State	Published - 2023
Externally published	Yes
Event	2023 Laser Science, LS 2023 - Tacoma, United States Duration: Oct 9 2023 → Oct 12 2023

Conference

Conference	2023 Laser Science, LS 2023
Country/Territory	United States
City	Tacoma
Period	10/9/23 → 10/12/23

Cite this

@conference{2d9bbc0e38254326a4b7394cc335458b,

title = "Resonantly driven piezoelectric MEMS for programmable photonic circuits",

abstract = "We report the design and characterization of piezoelectric MEMS optical modulators in large-scale programmable integrated photonics. The mechanical resonances are exploited to achieve modulation enhancement for a high-speed, periodic optical switch.",

author = "Mark Dong and Boyle, \{Julia M.\} and Palm, \{Kevin J.\} and Matthew Zimmermann and Alex Witte and Leenheer, \{Andrew J.\} and Daniel Dominguez and Gerald Gilbert and Matt Eichenfield and Dirk Englund",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023, {\textcopyright} 2023 The Authors.; 2023 Laser Science, LS 2023 ; Conference date: 09-10-2023 Through 12-10-2023",

year = "2023",

language = "English",

}

TY - CONF

T1 - Resonantly driven piezoelectric MEMS for programmable photonic circuits

AU - Dong, Mark

AU - Boyle, Julia M.

AU - Palm, Kevin J.

AU - Zimmermann, Matthew

AU - Witte, Alex

AU - Leenheer, Andrew J.

AU - Dominguez, Daniel

AU - Gilbert, Gerald

AU - Eichenfield, Matt

AU - Englund, Dirk

PY - 2023

Y1 - 2023

N2 - We report the design and characterization of piezoelectric MEMS optical modulators in large-scale programmable integrated photonics. The mechanical resonances are exploited to achieve modulation enhancement for a high-speed, periodic optical switch.

AB - We report the design and characterization of piezoelectric MEMS optical modulators in large-scale programmable integrated photonics. The mechanical resonances are exploited to achieve modulation enhancement for a high-speed, periodic optical switch.

UR - https://www.scopus.com/pages/publications/85215518421

M3 - Paper

AN - SCOPUS:85215518421

T2 - 2023 Laser Science, LS 2023

Y2 - 9 October 2023 through 12 October 2023

ER -

Resonantly driven piezoelectric MEMS for programmable photonic circuits

Abstract

Conference

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