SEM analysis of oxide thin films and reactions

Matthew T. Johnson; C. Barry Carter; Joseph Michael

doi:10.1111/j.1151-2916.1999.tb01981.x

SEM analysis of oxide thin films and reactions

Matthew T. Johnson
, C. Barry Carter
, Joseph Michael

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

The determination of orientation relationships between thin oxide films and the underlying single-crystal oxide substrates using electron backscattered diffraction (EBSD) in scanning electron microscopy (SEM) is discussed. In these well-defined systems, complementary information concerning the local chemistry can be obtained using high-resolution backscattered electron (BSE) imaging. Recent studies have shown the value of using EBSD patterns (EBSPs) in SEM.

Original language	English
Pages (from-to)	1644-1646
Number of pages	3
Journal	Journal of the American Ceramic Society
Volume	82
Issue number	6
DOIs	https://doi.org/10.1111/j.1151-2916.1999.tb01981.x
State	Published - Jan 1 1999
Externally published	Yes

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10.1111/j.1151-2916.1999.tb01981.x

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title = "SEM analysis of oxide thin films and reactions",

abstract = "The determination of orientation relationships between thin oxide films and the underlying single-crystal oxide substrates using electron backscattered diffraction (EBSD) in scanning electron microscopy (SEM) is discussed. In these well-defined systems, complementary information concerning the local chemistry can be obtained using high-resolution backscattered electron (BSE) imaging. Recent studies have shown the value of using EBSD patterns (EBSPs) in SEM.",

author = "Johnson, \{Matthew T.\} and Carter, \{C. Barry\} and Joseph Michael",

year = "1999",

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doi = "10.1111/j.1151-2916.1999.tb01981.x",

language = "English",

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pages = "1644--1646",

journal = "Journal of the American Ceramic Society",

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TY - JOUR

T1 - SEM analysis of oxide thin films and reactions

AU - Johnson, Matthew T.

AU - Carter, C. Barry

AU - Michael, Joseph

PY - 1999/1/1

Y1 - 1999/1/1

N2 - The determination of orientation relationships between thin oxide films and the underlying single-crystal oxide substrates using electron backscattered diffraction (EBSD) in scanning electron microscopy (SEM) is discussed. In these well-defined systems, complementary information concerning the local chemistry can be obtained using high-resolution backscattered electron (BSE) imaging. Recent studies have shown the value of using EBSD patterns (EBSPs) in SEM.

AB - The determination of orientation relationships between thin oxide films and the underlying single-crystal oxide substrates using electron backscattered diffraction (EBSD) in scanning electron microscopy (SEM) is discussed. In these well-defined systems, complementary information concerning the local chemistry can be obtained using high-resolution backscattered electron (BSE) imaging. Recent studies have shown the value of using EBSD patterns (EBSPs) in SEM.

UR - https://www.scopus.com/pages/publications/0032647508

U2 - 10.1111/j.1151-2916.1999.tb01981.x

DO - 10.1111/j.1151-2916.1999.tb01981.x

M3 - Article

SN - 0002-7820

VL - 82

SP - 1644

EP - 1646

JO - Journal of the American Ceramic Society

JF - Journal of the American Ceramic Society

IS - 6

ER -

SEM analysis of oxide thin films and reactions

Abstract

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