TY - GEN
T1 - Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation
AU - Senichev, Alexander
AU - Martin, Zachariah O.
AU - Wang, Yongqiang
AU - Htoon, Han
AU - Lagutchev, Alexei S.
AU - Boltasseva, Alexandra
AU - Shalaev, Vladimir M.
PY - 2023
Y1 - 2023
N2 - We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.
AB - We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.
UR - https://www.scopus.com/pages/publications/85176347747
M3 - Conference contribution
T3 - 2023 Conference on Lasers and Electro-Optics, CLEO 2023
BT - 2023 Conference on Lasers and Electro-Optics, CLEO 2023
PB - Unknown Publisher
T2 - 2023 Conference on Lasers and Electro-Optics, CLEO 2023
Y2 - 1 January 2023
ER -