Strength distribution of single-crystal silicon theta-like specimens

Michael S. Gaither; Frank W. Delrio; Richard S. Gates; Edwin R. Fuller; Robert F. Cook

doi:10.1016/j.scriptamat.2010.04.047

Strength distribution of single-crystal silicon theta-like specimens

Michael S. Gaither
, Frank W. Delrio
, Richard S. Gates
, Edwin R. Fuller
, Robert F. Cook

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Abstract

A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along {1 1 1} and {1 1 0} planes. © 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

Original language	English
Pages (from-to)	422-425
Number of pages	4
Journal	Scripta Materialia
Volume	63
Issue number	4
DOIs	https://doi.org/10.1016/j.scriptamat.2010.04.047
State	Published - Aug 1 2010
Externally published	Yes

Access to Document

10.1016/j.scriptamat.2010.04.047

Cite this

@article{0244416ed879486689d3e97fc3285b48,

title = "Strength distribution of single-crystal silicon theta-like specimens",

abstract = "A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along \{1 1 1\} and \{1 1 0\} planes. {\textcopyright} 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.",

author = "Gaither, \{Michael S.\} and Delrio, \{Frank W.\} and Gates, \{Richard S.\} and Fuller, \{Edwin R.\} and Cook, \{Robert F.\}",

year = "2010",

month = aug,

day = "1",

doi = "10.1016/j.scriptamat.2010.04.047",

language = "English",

volume = "63",

pages = "422--425",

journal = "Scripta Materialia",

issn = "1359-6462",

publisher = "Acta Materialia Inc",

number = "4",

}

TY - JOUR

T1 - Strength distribution of single-crystal silicon theta-like specimens

AU - Gaither, Michael S.

AU - Delrio, Frank W.

AU - Gates, Richard S.

AU - Fuller, Edwin R.

AU - Cook, Robert F.

PY - 2010/8/1

Y1 - 2010/8/1

N2 - A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along {1 1 1} and {1 1 0} planes. © 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

AB - A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along {1 1 1} and {1 1 0} planes. © 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

UR - https://www.scopus.com/pages/publications/77955665713

U2 - 10.1016/j.scriptamat.2010.04.047

DO - 10.1016/j.scriptamat.2010.04.047

M3 - Article

SN - 1359-6462

VL - 63

SP - 422

EP - 425

JO - Scripta Materialia

JF - Scripta Materialia

IS - 4

ER -

Strength distribution of single-crystal silicon theta-like specimens

Abstract

Access to Document

Fingerprint

Cite this