Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma

Ameya Bapat; Christopher R. Perrey; Steven A. Campbell; C. Barry Carter; Uwe Kortshagen

doi:10.1063/1.1586957

Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma

Ameya Bapat
, Christopher R. Perrey
, Steven A. Campbell
, C. Barry Carter
, Uwe Kortshagen

Research output: Contribution to journal › Article › peer-review

76 Scopus citations

Abstract

Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.

Original language	English
Pages (from-to)	1969-1974
Number of pages	6
Journal	Journal of Applied Physics
Volume	94
Issue number	3
DOIs	https://doi.org/10.1063/1.1586957
State	Published - Aug 1 2003
Externally published	Yes

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title = "Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma",

abstract = "Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.",

author = "Ameya Bapat and Perrey, \{Christopher R.\} and Campbell, \{Steven A.\} and Carter, \{C. Barry\} and Uwe Kortshagen",

year = "2003",

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AU - Bapat, Ameya

AU - Perrey, Christopher R.

AU - Campbell, Steven A.

AU - Carter, C. Barry

AU - Kortshagen, Uwe

PY - 2003/8/1

Y1 - 2003/8/1

N2 - Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.

AB - Single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma were synthesized. The transmission electron microscopy (TEM) images indicated that the nanoparticles were crystalline diamond cubic Si of a highly oriented character. It was found that the nanoparticles were cubic in shape, with the surfaces having non-uniform morphologies.

UR - https://www.scopus.com/pages/publications/0042934083

U2 - 10.1063/1.1586957

DO - 10.1063/1.1586957

M3 - Article

SN - 0021-8979

VL - 94

SP - 1969

EP - 1974

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 3

ER -

Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma

Abstract

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