Skip to main navigation Skip to search Skip to main content

Valence and atomic size dependent exchange barriers in vacancy-mediated dopant diffusion

Research output: Contribution to journal › Article › peer-review

58 Scopus citations

Abstract

First-principles pseudopotential calculations of dopant-vacancy exchange barriers indicate a strong dependency on dopant valence and atomic size, in contrast to current models of vacancy-mediated dopant diffusion. First-row elements (B, C, N) are found to have exchange barriers which are an order of magnitude larger than the assumed value of 0.3 eV (the Si vacancy migration energy). © 1998 American Institute of Physics.
Original languageEnglish
Pages (from-to)247-249
Number of pages3
JournalApplied Physics Letters
Volume73
Issue number2
DOIs
StatePublished - Dec 1 1998
Externally publishedYes

Fingerprint

Dive into the research topics of 'Valence and atomic size dependent exchange barriers in vacancy-mediated dopant diffusion'. Together they form a unique fingerprint.

Cite this