Abstract
First-principles pseudopotential calculations of dopant-vacancy exchange barriers indicate a strong dependency on dopant valence and atomic size, in contrast to current models of vacancy-mediated dopant diffusion. First-row elements (B, C, N) are found to have exchange barriers which are an order of magnitude larger than the assumed value of 0.3 eV (the Si vacancy migration energy). © 1998 American Institute of Physics.
| Original language | English |
|---|---|
| Pages (from-to) | 247-249 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 73 |
| Issue number | 2 |
| DOIs | |
| State | Published - Dec 1 1998 |
| Externally published | Yes |
Fingerprint
Dive into the research topics of 'Valence and atomic size dependent exchange barriers in vacancy-mediated dopant diffusion'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver