Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in

Aleem M. Siddiqui; Christopher D. Nordquist; Alejandro Grine; Stefan Lepkowsk; M. David Henry; Matt Eichenfield; Benjamin A. Griffin

doi:10.1109/MEMSYS.2018.8346675

Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in

Aleem M. Siddiqui
, Christopher D. Nordquist
, Alejandro Grine
, Stefan Lepkowsk
, M. David Henry
, Matt Eichenfield
, Benjamin A. Griffin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Biasing a MEMS switch close to static-pull in reduces the modulation amplitude necessary to achieve resonant pull-in, but results in a highly nonlinear system. In this work, we present a new methodology that captures the essential dynamics and provides a prescription for achieving the optimal drive waveform which reduces the amplitude requirements of the modulation source. These findings are validated both experimentally and through numerical modeling.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	795-800
Number of pages	6
Volume	2018-January
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346675
State	Published - Apr 24 2018
Externally published	Yes

Access to Document

10.1109/MEMSYS.2018.8346675

Cite this

Siddiqui, A. M., Nordquist, C. D., Grine, A., Lepkowsk, S., Henry, M. D., Eichenfield, M., & Griffin, B. A. (2018). Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (Vol. 2018-January, pp. 795-800) https://doi.org/10.1109/MEMSYS.2018.8346675

@inproceedings{c12241742f5449a088bd85a59b9b7cee,

title = "Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in",

abstract = "Biasing a MEMS switch close to static-pull in reduces the modulation amplitude necessary to achieve resonant pull-in, but results in a highly nonlinear system. In this work, we present a new methodology that captures the essential dynamics and provides a prescription for achieving the optimal drive waveform which reduces the amplitude requirements of the modulation source. These findings are validated both experimentally and through numerical modeling.",

author = "Siddiqui, \{Aleem M.\} and Nordquist, \{Christopher D.\} and Alejandro Grine and Stefan Lepkowsk and Henry, \{M. David\} and Matt Eichenfield and Griffin, \{Benjamin A.\}",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346675",

language = "English",

isbn = "9781538647820",

volume = "2018-January",

pages = "795--800",

booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

}

Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in. / Siddiqui, Aleem M.; Nordquist, Christopher D.; Grine, Alejandro et al.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2018-January 2018. p. 795-800.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in

AU - Siddiqui, Aleem M.

AU - Nordquist, Christopher D.

AU - Grine, Alejandro

AU - Lepkowsk, Stefan

AU - Henry, M. David

AU - Eichenfield, Matt

AU - Griffin, Benjamin A.

PY - 2018/4/24

Y1 - 2018/4/24

N2 - Biasing a MEMS switch close to static-pull in reduces the modulation amplitude necessary to achieve resonant pull-in, but results in a highly nonlinear system. In this work, we present a new methodology that captures the essential dynamics and provides a prescription for achieving the optimal drive waveform which reduces the amplitude requirements of the modulation source. These findings are validated both experimentally and through numerical modeling.

AB - Biasing a MEMS switch close to static-pull in reduces the modulation amplitude necessary to achieve resonant pull-in, but results in a highly nonlinear system. In this work, we present a new methodology that captures the essential dynamics and provides a prescription for achieving the optimal drive waveform which reduces the amplitude requirements of the modulation source. These findings are validated both experimentally and through numerical modeling.

UR - https://www.scopus.com/pages/publications/85046995848

U2 - 10.1109/MEMSYS.2018.8346675

DO - 10.1109/MEMSYS.2018.8346675

M3 - Conference contribution

SN - 9781538647820

VL - 2018-January

SP - 795

EP - 800

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ER -

Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in

Abstract

Access to Document

Fingerprint

Cite this