X-ray spectral imaging in the STEM for microelectronics failure analysis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Original language	English
Title of host publication	Microscopy and Microanalysis
Pages	998-999
Number of pages	2
Volume	9
Edition	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927603444991
State	Published - Jan 1 2003
Externally published	Yes

Access to Document

@inproceedings{aff53f80c8684aa485ff783b59c76418,

title = "X-ray spectral imaging in the STEM for microelectronics failure analysis",

author = "Kotula, \{P. G.\} and Keenan, \{M. R.\}",

year = "2003",

month = jan,

day = "1",

doi = "10.1017/s1431927603444991",

language = "English",

volume = "9",

pages = "998--999",

booktitle = "Microscopy and Microanalysis",

edition = "SUPPL. 2",

}