Research output per year
Research output per year
- 10 results
Search results
-
2021
Experimental Study of Shear and Tensile Properties of LIGA Ni-Fe and Ni-Co Alloys at Quasi-static and Intermediate Strain Rates
Liew, L. A., Read, D. T., Martin, M. L., Christenson, T. R., Bradley, P. E., Barbosa, N., Delrio, F. W., Smyth, J. R. & Geaney, J. T., Jan 1 2021, Conference Proceedings of the Society for Experimental Mechanics Series. p. 101-107 7 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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2016
Near-field microwave microscopy of one-dimensional nanostructures
Berweger, S., Blanchard, P. T., Quardokus, R. C., Delrio, F. W., Wallis, T. M., Kabos, P., Krylyuk, S. & Davydov, A. V., Aug 9 2016, IEEE MTT-S International Microwave Symposium Digest. Vol. 2016-August.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3 Scopus citations -
2014
Effect of organic SAMs on the evolution of strength of silicon nanostructures
Grutzik, S., Zehnder, A., Bush, B., DelRio, F., Gates, R. & Hines, M. A., Jan 1 2014, Conference Proceedings of the Society for Experimental Mechanics Series. Vol. 7. p. 59-64 6 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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2010
Theta-like specimen to determine tensile strength at the micro scale
Gaither, M. S., DelRio, F. W., Gates, R. S., Fuller, E. R. & Cook, R. F., Jun 1 2010, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 540-543 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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2009
A standard Method for measuring Wafer Bond Strength for mems applications
Allen, R. A., Marshall, J. C., Baylies, W. A., Read, D. T., Delrio, F., Turner, K. T., Bernasch, M. & Bagdahn, J., Jan 1 2009, ECS Transactions. 8 ed. Vol. 16. p. 449-455 7 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3 Scopus citations -
2007
Effects of relative humidity and actuation voltage on MEMS reliability
Hon, M., DelRio, F. W., Carraro, C. & Maboudian, R., Dec 1 2007, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. p. 367-370 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
4 Scopus citations -
2006
Van der Waals and capillary adhesion of microelectromechanical systems
Delrio, F. W., De Boer, M. P., Phinney, L. M., Bourdon, C. J. & Dunn, M. L., Jan 1 2006, American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2 Scopus citations -
2005
Properties of atomic layer deposited Al<inf>2</inf>O<inf>3</inf>/ZnO dielectric films grown at low temperature for RF MEMS
Herrmann, C. F., DelRio, F. W., George, S. M. & Bright, V. M., Jul 21 2005, Progress in Biomedical Optics and Imaging - Proceedings of SPIE. Vol. 5715. p. 159-166 8 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
23 Scopus citations -
2004
Atomic layer deposition of Al<inf>2</inf>O<inf>3</inf>/ZnO nano-scale films for gold RF MEMS
DelRio, F. W., Herrmann, C. F., Hoivik, N., George, S. M., Bright, V. M., Ebel, J. L., Strawser, R. E., Cortez, R. & Leedy, K. D., Sep 29 2004, IEEE MTT-S International Microwave Symposium Digest. Vol. 3. p. 1923-1926 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
12 Scopus citations -
Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors
Herrmann, C. F., Delrio, F. W., Bright, V. M. & George, S. M., Jul 19 2004, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 653-656 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
8 Scopus citations